Factory Automation Solutions

Brooks Automation offers the industry’s cleanest wafer sorter and loadports. The Spartan sorter delivers industry-leading particle performance along with productivity and serviceability, our 300mm Vision loadports are ultra-clean with reliable and flexible tool interfaces, and our 200mm SMIF load port transfers (LPT) products are the industry’s standard for adaptive SMIF solutions. Additionally, Brooks offers an innovative near-tool buffer solution to reduce AMHS bottlenecks and increase tool utilization.

Spartan 450 Sorter
IsoPort Load Port