Semiconductor Contamination Control

Brooks Automation offers the industry’s most advanced suite of FOUP carrier/reticle pod cleaners and photomask/reticle stockers. Using state-of-the-art humidity control along with in-situ metrology, our products address all critical airborne molecular contamination, productivity, and process stability challenges at sub20-nm nodes.

Contamination Control Product Family Brochure

M800 300mm FOUP/Pod Cleaners